Effect of RF sputtering parameters on the nanoscratch properties of quinary Ti-Zr-Cu-Ni-Al thin film metallic glass

Paremmal, P. and Karati, A. and Murty, B S and et al, . (2022) Effect of RF sputtering parameters on the nanoscratch properties of quinary Ti-Zr-Cu-Ni-Al thin film metallic glass. Journal of Alloys and Compounds, 908. pp. 1-12. ISSN 0925-8388

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Recently, thin film metallic glasses (TFMGs) gained renewed attention as they can circumvent the brittleness problem of bulk metallic glasses. When sputtered from a multicomponent cast target, the composition control of TFMG is always challenging. Here, we demonstrate the tight composition control of sputtered Ti-Zr-Cu-Ni-Al TFMG by a spark plasma sintered multicomponent target and investigate their structural and nanoscratch properties. The radio frequency (RF) power and Ar pressure were tuned to optimize nanoscratch properties. The highest hardness (~16.2 GPa) and thus best nanoscratch resistance was obtained at an RF power of 160 W and Ar pressure of 7 Pa. The best nanoscratch properties originated from the dense, fine column morphology of the TFMG. Moreover, it was found that the scratch mechanism changed from plowing to a combination of plowing and stick-slip under a ramping scratching load of 10 mN. The transition happened progressively at lower loads when the hardness of the TFMG decreased. This study provides a useful guideline for developing TFMG as a scratch-resistant protective coating. © 2022 Elsevier B.V.

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IITH Creators:
IITH CreatorsORCiD
Murty, B Shttps://orcid.org/0000-0002-4399-8531
Item Type: Article
Additional Information: The authors would like to thank Mr. Rahul S. and Dr. Sreeram K. Kalpathy of IIT Madras for contact angle measurements carried out in their lab on the Acam-D3 equipment (EMR/2016/001479 SERB, New Delhi, India). The authors would also like to thank Dr. Rajesh Korla of IIT Hyderabad, India, for the nano-scratch test carried out in their lab.
Uncontrolled Keywords: Elastic modulus, Hardness, Nano-scratch, RF-sputtering, Thin film metallic glass
Subjects: Others > Metallurgy Metallurgical Engineering
Divisions: Department of Material Science Engineering
Depositing User: . LibTrainee 2021
Date Deposited: 22 Jun 2022 04:57
Last Modified: 22 Jun 2022 09:09
URI: http://raiith.iith.ac.in/id/eprint/9336
Publisher URL: https://doi.org/10.1016/j.jallcom.2022.164615
OA policy: https://v2.sherpa.ac.uk/id/publication/13772
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