Influence of fabrication tolerances on performance characteristics of a MEMS gyroscope

Biswas, Arnab and Pawar, Vishal S. and Menon, P. Krishna and Pal, Prem and Pandey, Ashok Kumar (2021) Influence of fabrication tolerances on performance characteristics of a MEMS gyroscope. Microsystem Technologies, 27 (7). pp. 2679-2693. ISSN 0946-7076

Full text not available from this repository. (Request a copy)


Fabrication of high aspect ratio microelectromechanical systems (MEMS) like comb drive structures are mostly done by DRIE (Deep Reactive Ion Etching) process. Bosch process is a type of DRIE which involves alternate repetition of plasma etching and side wall passivation to achieve deep vertical structures. A continued plasma etching may lead to tapered wall due to some lateral etching. Although, a straight and smooth wall is expected due to combined alternate processes of etching and passivation, very often the resulting walls are having surface undulations called as scalloping. So, due to slanting, scalloping and combined slanting and scalloping defects the working and performance of a MEMS device get affected. MEMS gyrocope is one such widely comercialized device, which is required to measure angular rotation wth certain accuracy. We take a simple single-axis MEMS vibratory gyroscope to study the effect on these defects on its dynamics performance. The study presented in the paper may be useful for including undesirable effects in designing MEMS vibratory gyroscopes.

[error in script]
IITH Creators:
IITH CreatorsORCiD
Item Type: Article
Uncontrolled Keywords: Deep Reactive Ion Etching; Dynamics performance; Fabrication tolerances; MEMS vibratory gyroscope; Micro electromechanical system (MEMS); Performance characteristics; Undesirable effects; Vertical structures
Subjects: Physics
Divisions: Department of Civil Engineering
Depositing User: . LibTrainee 2021
Date Deposited: 19 Jul 2021 04:26
Last Modified: 19 Jul 2021 04:26
Publisher URL:
OA policy:
Related URLs:

Actions (login required)

View Item View Item
Statistics for RAIITH ePrint 8406 Statistics for this ePrint Item