Singh, S S and Li, Y and Pal, Prem and et al, .
(2014)
Simulation of thin film deposition profile on complex 2-D MEMS Structures.
In: 7th Asia-pacific Conference on Transducers and Micro-Nano Technology(APCOT), 29 June-2 July 2014, Daegu Korea.
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| IITH Creators: |
| IITH Creators | ORCiD |
|---|
| Pal, Prem | UNSPECIFIED |
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| Item Type: |
Conference or Workshop Item
(Paper)
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| Subjects: |
Physics |
| Divisions: |
Department of Physics |
| Depositing User: |
Library Staff
|
| Date Deposited: |
13 Sep 2019 10:56 |
| Last Modified: |
13 Sep 2019 10:58 |
| URI: |
http://raiith.iith.ac.in/id/eprint/6247 |
| Publisher URL: |
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| Related URLs: |
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