Fabrication of micro separation column for miniaturized gas chromatography system

P M, Greeshma and Singh, Shiv Govind (2018) Fabrication of micro separation column for miniaturized gas chromatography system. Masters thesis, Indian Institute of Technology Hyderabad.

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The emphasis of this work is on the fabrication of a micro separation column for applicaton in miniaturized gas chromatography system. The micro column was made by microchannels fabricated on the silicon wafer and sealed with a glass lid. The microchannels were fabricated by wet etching process and the channels were of length 2m , width 200 μm and depth 100 μm. The channels were closed by sealing with Pyrex glass. Silicide bonding was done for the bonding of silicon with Pyrex glass. Ti was used as an intermediate layer and bonded at a temperature of 377 ◦C and a force of 1kN. During bonding Ti forms an alloy with silicon and forms Titanium silicide and this helps to bond the glass wafer with silicom wafer with microchannels etched on it.

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IITH Creators:
IITH CreatorsORCiD
Singh, Shiv Govindhttp://orcid.org/0000-0001-7319-879X
Item Type: Thesis (Masters)
Subjects: Electrical Engineering
Divisions: Department of Electrical Engineering
Depositing User: Team Library
Date Deposited: 04 Jul 2018 06:31
Last Modified: 04 Jul 2018 06:31
URI: http://raiith.iith.ac.in/id/eprint/4174
Publisher URL:
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