Piezoelectric Micromachined Ultrasonic Transducer Using Silk Piezoelectric Thin Film

Joseph, Jose and Singh, Shiv Govind and Vanjari, Siva Rama Krishna (2018) Piezoelectric Micromachined Ultrasonic Transducer Using Silk Piezoelectric Thin Film. IEEE Electron Device Letters. p. 1. ISSN 0741-3106 (In Press)

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In this paper, we present for the first time, a successful fabrication and characterization of silk piezoelectric thin film based Piezoelectric Micromachined Ultrasonic Transducer (PMUT). One of the exacting problem in the PMUT research is to find a suitable piezoelectric material to be used as the sensing and actuating element. Utilizing its innate piezoelectricity, we have used ultra-smooth silk thin film (RMS roughness = 2.84 nm, d33 = 56.2 pm/V) as the piezoelectric element of the PMUT. The silicon membrane of the PMUT is realized by bulk micromachining. The challenging task of integrating the silk thin film above the micromachined membrane is successfully accomplished and the device functionality is demonstrated. The silk PMUT exhibited center frequency at 76.59 kHz with a fractional bandwidth of 3.18 %, when characterized in air.

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IITH Creators:
IITH CreatorsORCiD
Singh, Shiv Govindhttp://orcid.org/0000-0001-7319-879X
Vanjari, Siva Rama KrishnaUNSPECIFIED
Item Type: Article
Uncontrolled Keywords: Piezoelectric Micromachined Ultrasonic Transducer (PMUT), Silk thin film, Piezoelectricity, Ultrasonics
Subjects: Electrical Engineering
Divisions: Department of Electrical Engineering
Depositing User: Team Library
Date Deposited: 11 Apr 2018 04:51
Last Modified: 11 Apr 2018 04:51
URI: http://raiith.iith.ac.in/id/eprint/3860
Publisher URL: http://doi.org/10.1109/LED.2018.2816646
OA policy: http://www.sherpa.ac.uk/romeo/issn/0741-3106/
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