Fabrication and characterization of SU-8-based capacitive micromachined ultrasonic transducer for airborne applications

Joseph, Jose and Singh, Shiv Govind and Vanjari, Siva Rama Krishna (2018) Fabrication and characterization of SU-8-based capacitive micromachined ultrasonic transducer for airborne applications. Journal of Micro/Nanolithography, MEMS, and MOEMS, 17 (01). p. 1. ISSN 1932-5150

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We present a successful fabrication and characterization of a capacitive micromachined ultrasonic transducer (CMUT) with SU-8 as the membrane material. The goal of this research is to develop a post-CMOS compatible CMUT that can be monolithically integrated with the CMOS circuitry. The fabrication is based on a simple, three mask process, with all wet etching steps involved so that the device can be realized with minimal laboratory conditions. The maximum temperature involved in the whole process flow was 140°C, and hence, it is post-CMOS compatible. The fabricated device exhibited a resonant frequency of 835 kHz with bandwidth 62 kHz, when characterized in air. The pull-in and snapback characteristics of the device were analyzed. The influence of membrane radius on the center frequency and bandwidth was also experimentally evaluated by fabricating CMUTs with membrane radius varying from 30 to 54μm with an interval of 4μm . These devices were vibrating at frequencies from 5.2 to 1.8 MHz with an average Q -factor of 23.41. Acoustic characterization of the fabricated devices was performed in air, demonstrating the applicability of SU-8 CMUTs in airborne applications. © 2018 Society of Photo-Optical Instrumentation Engineers (SPIE)

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IITH Creators:
IITH CreatorsORCiD
Vanjari, Siva Rama KrishnaUNSPECIFIED
Singh, Shiv Govindhttp://orcid.org/0000-0001-7319-879X
Item Type: Article
Subjects: Electrical Engineering
Divisions: Department of Electrical Engineering
Depositing User: Team Library
Date Deposited: 26 Feb 2018 04:02
Last Modified: 26 Feb 2018 04:02
URI: http://raiith.iith.ac.in/id/eprint/3798
Publisher URL: http://doi.org/10.1117/1.JMM.17.1.015003
OA policy: http://www.sherpa.ac.uk/romeo/issn/1932-5150/
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