Leveraging Innate Piezoelectricity of Ultra-Smooth Silk Thin Films for Flexible and Wearable Sensor Applications

Joseph, J and Singh, Shiv Govind and Vanjari, Siva Rama Krishna (2017) Leveraging Innate Piezoelectricity of Ultra-Smooth Silk Thin Films for Flexible and Wearable Sensor Applications. IEEE Sensors Journal. ISSN 1530-437X (In Press)

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In this paper, the innate peizoelectricity of silk is utilized to demonstrate an optimized silk thin film based pressure sensor. Furthermore, a novel approach to pattern silk films is proposed, that could potentially lead to the development of a variety of miniaturized, flexible, wearable sensors. The key in this endeavor is to achieve a uniform thin film of silk. The preparation methodology was optimized to achieve an ultra-smooth, reproducible thin film. The surface quality of the optimized thin film was analyzed using Atomic Force Microscopy and the RMS roughness was found to be 2.43 nm. The piezo-response of the silk film was measured using Piezo Force Microscopy and the average d33 value of the silk piezoelectric thin film was estimated as 56.7 pm/V. A pressure sensor using silk piezoelectric thin film was developed with a simple process flow. This process is devoid of any silk patterning steps. Keeping in view the potentiality of piezoelectric silk films in MEMS, a novel lithography based technique was developed to pattern the silk films. This patterning technique can easily be integrated with any standard MEMS/Post CMOS process flow, thus opening up a new avenue in developing a variety of sensors.

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IITH Creators:
IITH CreatorsORCiD
Singh, Shiv Govindhttp://orcid.org/0000-0001-7319-879X
Vanjari, Siva Rama KrishnaUNSPECIFIED
Item Type: Article
Uncontrolled Keywords: Silk, piezoelectricity, sensors, MEMS
Subjects: Electrical Engineering > Electrical and Electronic
Divisions: Department of Electrical Engineering
Depositing User: Library Staff
Date Deposited: 03 Nov 2017 11:49
Last Modified: 06 Nov 2017 05:03
URI: http://raiith.iith.ac.in/id/eprint/3642
Publisher URL: https://doi.org/10.1109/JSEN.2017.2766163
OA policy: http://www.sherpa.ac.uk/romeo/issn/1530-437X/
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