Capacitance and Force Computation Due to Direct and Fringing Effects in MEMS/NEMS Arrays

Kambali, P N and Pandey, Ashok Kumar (2016) Capacitance and Force Computation Due to Direct and Fringing Effects in MEMS/NEMS Arrays. IEEE Sensors Journal, 16 (2). pp. 375-382. ISSN 1530-437X

Full text not available from this repository. (Request a copy)


An accurate computation of electrical force is significant in analyzing the performance of microelectromechanical systems and nanoelectromechanical systems. Many analytical and empirical models are available for computing the forces, especially, for a single set of parallel plates. In general, these forces are computed based on the direct electric field between the overlapping areas of the plates and the fringing field effects. Most of the models, which are based on direct electric field effect, consider only the trivial cases of the fringing field effects. In this paper, we propose different models which are obtained from the numerical simulations. It is found to be useful in computing capacitance as well force in simple and complex configurations consisting of an array of beams and electrodes. For the given configurations, the analytical models are compared with the available models and numerical results. While the percentage error of the proposed model is found to be under 6% with respect to the numerical results, the error associated with the analytical model without the fringing field effects is similar to 50%. The proposed model can be applied to the devices in which the fringing field effects are dominant.

[error in script]
IITH Creators:
IITH CreatorsORCiD
Pandey, Ashok KumarUNSPECIFIED
Item Type: Article
Uncontrolled Keywords: Electrostatic force; fringing force; MEMS; NEMS; capacitance; arrays
Subjects: Physics > Electricity and electronics
Physics > Astronomy Astrophysics
?? sub4.9 ??
Divisions: Department of Physics
Depositing User: Team Library
Date Deposited: 01 Mar 2016 07:00
Last Modified: 10 Nov 2017 06:20
Publisher URL:
OA policy:
Related URLs:

Actions (login required)

View Item View Item
Statistics for RAIITH ePrint 2224 Statistics for this ePrint Item