A low pull-in SU-8 based Capacitive Micromachined Ultrasonic Transducer for medical imaging applications

Joseph, J and Singh, Shiv Govind and Vanjari, Siva Rama Krishna (2014) A low pull-in SU-8 based Capacitive Micromachined Ultrasonic Transducer for medical imaging applications. In: 36th Annual International Conference of the IEEE Engineering in Medicine and Biology Society, EMBC, 26-30 August 2014, Chicago; United States.

Full text not available from this repository. (Request a copy)


In this paper we present a thorough analysis of a low pull-in voltage Capacitive Micromachined Ultrasonic Transducer (CMUT) using SU-8 as the membrane material. It is designed to operate at 1 MHz frequency that has a wide range of applications including the imaging of deeper organs. We also propose a simple state-of-the-art fabrication methodology for the same. As compared to the standard Silicon Nitride CMUTs, the proposed structure gives the same electromechanical coupling coefficient with lower membrane dimensions and low pull-in voltage which in turn results in reduced area and power consumption. Moreover the proposed fabrication methodology is a low temperature process which makes it CMOS compatible.

[error in script]
IITH Creators:
IITH CreatorsORCiD
Singh, Shiv Govindhttp://orcid.org/0000-0001-7319-879X
Vanjari, Siva Rama KrishnaUNSPECIFIED
Item Type: Conference or Workshop Item (Paper)
Uncontrolled Keywords: biomedical ultrasonics, ultrasonic imaging, ultrasonic transducers
Subjects: Others > Electricity
Physics > Electricity and electronics
Divisions: Department of Electrical Engineering
Depositing User: Team Library
Date Deposited: 05 Jun 2015 05:38
Last Modified: 16 Jan 2019 10:49
URI: http://raiith.iith.ac.in/id/eprint/1559
Publisher URL: https://doi.org/10.1109/EMBC.2014.6943861
Related URLs:

Actions (login required)

View Item View Item
Statistics for RAIITH ePrint 1559 Statistics for this ePrint Item