A Ku band 5 bit MEMS phase shifter for active electronically steerable phased array applications

Sharma, A K and Gautam, A K and Farinelli, P and Dutta, A and Singh, Shiv Govind (2015) A Ku band 5 bit MEMS phase shifter for active electronically steerable phased array applications. Journal of Micromechanics and Microengineering, 25 (035014). ISSN 0960-1317

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The design, fabrication and measurement of a 5 bit Ku band MEMS phase shifter in different configurations, i.e. a coplanar waveguide and microstrip, are presented in this work. The development architecture is based on the hybrid approach of switched and loaded line topologies. All the switches are monolithically manufactured on a 200 μ m high resistivity silicon substrate using 4 inch diameter wafers. The first three bits (180°, 90° and 45°) are realized using switched microstrip lines and series ohmic MEMS switches whereas the fourth and fifth bits (22.5° and 11.25°) consist of microstrip line sections loaded by shunt ohmic MEMS devices. Individual bits are fabricated and evaluated for performance and the monolithic device is a 5 bit Ku band (16-18 GHz) phase shifter with very low average insertion loss of the order of 3.3 dB and a return loss better than 15 dB over the 32 states with a chip area of 44 mm2. A total phase shift of 348.75° with phase accuracy within 3° is achieved over all of the states. The performance of individual bits has been optimized in order to achieve an integrated performance so that they can be implemented into active electronically steerable antennas for phased array applications.

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IITH Creators:
IITH CreatorsORCiD
Singh, Shiv Govindhttp://orcid.org/0000-0001-7319-879X
Item Type: Article
Uncontrolled Keywords: insertion loss; loaded line; ohmic switch; phase shifter; phased array; shunt switch; steerable
Subjects: Others > Electricity
Divisions: Department of Electrical Engineering
Depositing User: Library Staff
Date Deposited: 05 Mar 2015 07:10
Last Modified: 16 Jan 2019 09:01
URI: http://raiith.iith.ac.in/id/eprint/1372
Publisher URL: https://doi.org/10.1088/0960-1317/25/3/035014
OA policy: http://www.sherpa.ac.uk/romeo/issn/0960-1317/
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