Evaluation of mode dependent fluid damping in a high frequency drumhead microresonator

Vishwakarma, S D and Pandey, Ashok Kumar and Parpia, J M and Southworth, D R and Craighead, H G and Pratap, R (2014) Evaluation of mode dependent fluid damping in a high frequency drumhead microresonator. Journal of Microelectromechanical Systems, 23 (2). pp. 334-346. ISSN 1057-7157

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Design of high quality factor (Q) micromechanical resonators depends critically on our understanding of energy losses in their oscillations. The Q of such structures depends on process induced prestress in the structural geometry, interaction with the external environment, and the encapsulation method. We study the dominant fluid interaction related losses, namely, the squeeze film damping and acoustic radiation losses in a drumhead microresonator subjected to different prestress levels, operated in air, to predict its Q in various modes of oscillation. We present a detailed research of the acoustic radiation losses, associated with the 15 transverse vibration modes of the resonator using a hybrid analytical-computational approach. The prestressed squeeze film computation is based on the standard established numerical procedure. Our technique of computing acoustic damping based quality factor Qac includes calculation of the exact prestressed modes. We find that acoustic losses result in a non-monotonic variation of Qac in lower unstressed modes. Such non-monotonic variation disappears with the increase in the prestress levels. Although squeeze film damping dominates the net Q at lower frequencies, acoustic radiation losses dominate at higher frequencies. The combined computed losses correctly predict the experimentally measured Q of the resonator over a large range of resonant frequencies

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IITH Creators:
IITH CreatorsORCiD
Pandey, Ashok KumarUNSPECIFIED
Item Type: Article
Uncontrolled Keywords: acoustic radiation damping; annular plate vibration; exact modeshape; high Q resonators; nonmonotonic acoustic losses; Prestressed micro drum resonator; squeeze film damping
Subjects: Physics > Mechanical and aerospace
Divisions: Department of Mechanical & Aerospace Engineering
Depositing User: Team Library
Date Deposited: 17 Dec 2014 06:24
Last Modified: 10 Nov 2017 06:24
URI: http://raiith.iith.ac.in/id/eprint/1177
Publisher URL: https://doi.org/10.1109/JMEMS.2013.2273803
OA policy: http://www.sherpa.ac.uk/romeo/issn/1057-7157/
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