Wet bulk micromachining characteristics of Si{110} in NaOH-based solution

Purohit, S and Swarnalatha, V and Pandey, Ashok Kumar and Sharma, R K and Pal, Prem (2022) Wet bulk micromachining characteristics of Si{110} in NaOH-based solution. Journal of Micromechanics and Microengineering, 32 (12). ISSN 0960-1317

Full text not available from this repository. (Request a copy)


Silicon wet bulk micromachining is an extensively used technique in microelectromechanical systems (MEMS) to fabricate variety of microstructures. It utilizes low-cost etchants and suitable for batch process that made it popular for industrial production. The etch rate and the undercutting at convex corner significantly affect the productivity. In wet anisotropic etching-based micromachining, Si{110} wafer is employed to fabricate unique shape geometries such as the microstructures with vertical sidewalls. In this research, we have investigated the etching characteristics of Si{110} in 10 M sodium hydroxide without and with addition of hydroxylamine (NH2OH). The main objective of the present work is to improve the etch rate and the undercutting at convex corners. Average surface roughness (R (a)), etch depth, and undercutting length are measured using a 3D scanning laser microscope. Surface morphology of the etched Si{110} surface is examined using a scanning electron microscope. The incorporation of NH2OH significantly improves the etch rate and the corner undercutting, which are useful to enhance the productivity. Additionally, the effect of etchant age on the etch rate and other etching characteristics are investigated. The etch rate of silicon and the undercutting at convex corners decrease with etchant aging. The results presented in this paper are very useful to scientists and engineers who use silicon wet anisotropic etching to fabricate MEMS structures using bulk micromachining. Moreover, it has great potential to promote the application of wet etching in MEMS.

[error in script]
IITH Creators:
IITH CreatorsORCiD
Pandey, Ashok Kumarhttps://orcid.org/0000-0002-5878-6451
Pal, Premhttps://orcid.org/0000-0001-7345-9769
Item Type: Article
Additional Information: This work was supported by research grant from the Council of Scientific and Industrial Research (CSIR, Ref: 22(0824)/19/EMR-II,0527/NS), We would greatly acknowledge CSIR for the financial support.
Subjects: Physics > Mechanical and aerospace
Divisions: Department of Mechanical & Aerospace Engineering
Department of Physics
Depositing User: . LibTrainee 2021
Date Deposited: 21 Nov 2022 12:01
Last Modified: 21 Nov 2022 12:01
URI: http://raiith.iith.ac.in/id/eprint/11360
Publisher URL: http://doi.org/10.1088/1361-6439/ac9b64
OA policy: https://v2.sherpa.ac.uk/id/publication/11321
Related URLs:

Actions (login required)

View Item View Item
Statistics for RAIITH ePrint 11360 Statistics for this ePrint Item