Comparative study of perforated microcantilevers for MEMS applications

Purohit, Soumya and Pal, Prem and Pandey, Ashok Kumar (2021) Comparative study of perforated microcantilevers for MEMS applications. In: 2021 Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2021, 25 August 2021 through 27 August 2021, Paris.

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In this paper, the circular, square and hexagonal perforations of size 2.5 μm-14.5 μm are considered and compared with a simple rectangular beam. Structural and coupled structural-electrostatic analyses are performed using COMSOL Metaphysics to obtain the results. As the perforation size increases, both resonance frequency and static deflection of the beam increase and the pull-in voltage decrease. Among all the proposed designs, design with hexagonal perforation has the highest resonance frequency of 34.5 kHz. Static deflection is found to be greater in beams with circular perforations. Beam with square perforations has the lowest pull-in voltage of 3.84 V. © 2021 IEEE.

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IITH Creators:
IITH CreatorsORCiD
Pal, Prem
Pandey, Ashok Kumar
Item Type: Conference or Workshop Item (Paper)
Additional Information: Soumya Purohit acknowledge the Ministry of Education for providing the fellowship. The work is partially supported by DRDO and CSIR.
Uncontrolled Keywords: cantilever; MEMS; perforations
Subjects: Physics > Mechanical and aerospace
Divisions: Department of Mechanical & Aerospace Engineering
Department of Physics
Depositing User: . LibTrainee 2021
Date Deposited: 08 Aug 2022 10:18
Last Modified: 08 Aug 2022 10:18
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