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Number of items: 11.

Article

Gosalvez, M A and Pal, P and Ferrando, N and Sato, K (2011) Reliability assessment of the complete 3D etch rate distribution of Si in anisotropic etchants based on vertically micromachined wagon wheel samples. Journal of Micromechanics and Microengineering, 21 (12). ISSN 0960-1317

Goslvez, M A and Ferrando, N and Xing, Y and Pal, P and Sato, K and Cerda, J and Gadea, R (2011) Simulating anisotropic etching of silicon in any etchant: Evolutionary algorithm for the calibration of the continuous cellular automaton. Journal of Micromechanics and Microengineering, 21 (6). ISSN 0960-1317

Tang, B and Shikida, M and Pal, P and Amakawa, H and Hida, H and Fukuzawa, K (2010) Study of surfactant-added TMAH for applications in DRIE and wet etching-based micromachining. Journal of Micromechanics and Microengineering, 20 (6). ISSN 0960-1317

Book Section

Singh, S S and Li, Y and Xing, Y and Pal, P (2014) The Application of Level Set Method for Simulation of PECVD/LPCVD Processes. In: Physics of Semiconductor Devices: 17th International Workshop on the Physics of Semiconductor Devices 2013. Environmental Science and Engineering . Springer International Publishing, pp. 239-242. ISBN 978-3-319-03001-2

Akarapu, A and Pal, P (2014) Optical Characterization of Anodically Grown Silicon Dioxide Thin Films. In: Physics of Semiconductor Devices: 17th International Workshop on the Physics of Semiconductor Devices 2013. Environmental Science and Engineering . Springer International Publishing, Switzerland, pp. 437-440. ISBN 9783319030029

Conference or Workshop Item

Akarapu, A and Pal, P (2015) Room temperature synthesis of silicon dioxide thin films for MEMS and silicon surface texturing. In: Micro Electro Mechanical Systems (MEMS), 2015 28th IEEE International Conference, 18-22 January, 2015, Estoril, Portugal.

Tang, B and Yao, M and Tan, G and Pal, P and Sato, K and Su, W (2014) Smoothness Control of Wet Etched Si{100} Surfaces In TMAH+Triton. In: Key Engineering Materials, 3-6, November 2013, Tianjin; China.

A, Ashok and Pal, P (2014) Study of anodically grown silicon dioxide thin film in TMAH. In: 7th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT), 29th June to 2nd July, 2014, Daegu, Korea.

Li, Y and Xing, Y and Gosalvez, M A and Pal, P and Zhou, Y (2013) Particle Swarm Optimization of Model Parameters: Simulation of Deep Reactive Ion Etching by the Continuous Cellular Automaton. In: 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS, 16-20 June 2013, Barcelona; Spain;.

Pal, P and Sato, K and Hida, H (2012) MEMS components with perfectly protected edges and corners in Si{110} wafers. In: Annual Symp. on Micro-Nano Mechatronics and Human Science, MHS 2011, Held Jointly with the Symp. on COE for Education and Research of Micro-Nano Mechatronics, 6-9, November 2012, Nagoya; Japan.

Book

Pal, P and Sato, K (2017) Silicon Wet Bulk Micromachining for MEMS. CRC Press. ISBN 9789814613729

This list was generated on Fri Nov 10 11:41:46 2017 IST.