Area Effective Silicon Micro Structure Only Using Front End Bulk Micro Machining

Mohanty, R and Karthik, C and Singh, Shiv Govind and et al, . (2014) Area Effective Silicon Micro Structure Only Using Front End Bulk Micro Machining. In: ICMEMS 2014, 18-20 December 2014, Chennai, India.

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IITH Creators:
IITH CreatorsORCiD
Singh, Shiv Govindhttp://orcid.org/0000-0001-7319-879X
Item Type: Conference or Workshop Item (Paper)
Subjects: Electrical Engineering
Divisions: Department of Electrical Engineering
Depositing User: Library Staff
Date Deposited: 12 Sep 2019 09:57
Last Modified: 12 Sep 2019 09:57
URI: http://raiith.iith.ac.in/id/eprint/6211
Publisher URL:
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