Characterization of SOI technology based MEMS differential capacitive accelerometer and its estimation of resolution by near vertical tilt angle measurements

Parmar, Yashoda and Gupta, Nidhi and Vanjari, Siva Rama Krishna and et al, . (2019) Characterization of SOI technology based MEMS differential capacitive accelerometer and its estimation of resolution by near vertical tilt angle measurements. Microsystem Technologies. ISSN 0946-7076

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IITH Creators:
IITH CreatorsORCiD
Vanjari, Siva Rama KrishnaUNSPECIFIED
Item Type: Article
Subjects: Electrical Engineering
Divisions: Department of Electrical Engineering
Depositing User: Team Library
Date Deposited: 02 Aug 2019 04:03
Last Modified: 02 Aug 2019 04:03
URI: http://raiith.iith.ac.in/id/eprint/5853
Publisher URL: http://doi.org/10.1007/s00542-019-04561-6
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