Amorphous-Carbon/Si Heterojunction device for Room Temperature NH3 Sensing and Development of Readout Circuit for Chemiresistive Sensor

Eliganti, Venkatesh and Ch, Gajendranath Chaudhury (2018) Amorphous-Carbon/Si Heterojunction device for Room Temperature NH3 Sensing and Development of Readout Circuit for Chemiresistive Sensor. Masters thesis, Indian Institute of Technology Hyderabad.

[img]
Preview
Text
Thesis_Mtech_EE_4173.pdf - Published Version

Download (2MB) | Preview

Abstract

Classical metal oxide gas sensors are used to be operated at relatively high temperatures to achieve good sensitivity. So there is a strong need to develop a gas sensing platform that provides either low temperature or room temperature sensing, so as to reduce the power consumption. Keeping this in mind, in this work, we have proposed and fabricated an amorphous-Carbon/Silicon (a-C/Si) heterojunction based room temperature ammonia gas sensor. We have optimized the fabrication process flow for obtaining a stable a-C thin film on Si substrate with strong adhesion. Here, to develop the a-C film, we have used pyrolysis of negative photoresist material SU8, which also provides us with the added benefit of photo-patternability. One of the desired outcomes of the proposed work is to provide a reduced response and recovery time. Also, we have targeted to achieve a low limit of detection with high selectivity. Additionally, we have developed a readout circuit for chemiresistive sensors, where change in device resistance is used as a transduction principle for targeted analyte detection. The circuit is designed to meet the specification of the sensor, where the desired detection range extended up to a few hundred Mega ohms. The requirements of the system have been studied and implemented using Cadence. The prototype of the circuit has been designed and tested.

[error in script]
IITH Creators:
IITH CreatorsORCiD
Ch, Gajendranath ChaudhuryUNSPECIFIED
Item Type: Thesis (Masters)
Uncontrolled Keywords: Amorphous-Carbon, Si Heterojunction, NH3 Sensing
Subjects: Electrical Engineering
Divisions: Department of Electrical Engineering
Depositing User: Team Library
Date Deposited: 04 Jul 2018 06:26
Last Modified: 04 Jul 2018 06:26
URI: http://raiith.iith.ac.in/id/eprint/4173
Publisher URL:
Related URLs:

Actions (login required)

View Item View Item
Statistics for RAIITH ePrint 4173 Statistics for this ePrint Item