Fabrication of Cost Effective Microbolometer using front end bulk Micromachining

Reddy, R Ranga (2016) Fabrication of Cost Effective Microbolometer using front end bulk Micromachining. Masters thesis, Indian Institute of Technology Hyderabad.

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Abstract

Frontend bulk micro machining is one of the proven techniques of making suspended microstructures and is highly adapted due to its simple and cost effective way of fabricating the devices. In this thesis we propose a low-cost un-cooled infrared micro-bolometer detector, where the Si itself is used as the infrared sensitive material. The process does not required any diffusion or electrochemical etch-stop technique as is required in traditional CMOS line micro-bolometer fabrication. Rather we are reporting two ways of fabricating the device. The first method is done by frontend bulk micromachining using wet etching which helps us realize the device with relatively low cost as compared to other proposed method of fabricating the device. The second uses both dry and wet etching which reduces the area per pixel. In this work we adapt the geometric mask design such that the openings are aligned at 45º to wafer prime flat of silicon (100) wafer and act as etch openings for frontend bulk micromachining. The fabrication process was simulated using Intellisuite FABSIM based physical simulator. The proposed concept was experimented and verified by fabricating micro bridges/ cantilevers. Further the same concept was applied to fabricate micro-bolometer (IR sensor).

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IITH Creators:
IITH CreatorsORCiD
Item Type: Thesis (Masters)
Uncontrolled Keywords: Microbolometer, Bulk Micromachining, TD566
Subjects: Physics > Electricity and electronics
Divisions: Department of Electrical Engineering
Depositing User: Library Staff
Date Deposited: 30 Jun 2016 09:42
Last Modified: 06 Jul 2016 05:19
URI: http://raiith.iith.ac.in/id/eprint/2502
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