Electrostatic forces in fixed-fixed microbeams under direct and fringing field effects

Kambali, P N and Pandey, A K (2014) Electrostatic forces in fixed-fixed microbeams under direct and fringing field effects. In: IEEE 2nd International Conference on Emerging Electronics (ICEE), 3-6 Dec, 2014, Bengalore.

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Abstract

We propose simple approximate expressions for capacitance and electrostatic force for fixed-fixed beam-based MEMS/NEMS devices subjected to direct electrostatic and fringing field effects. The configuration that are considered for study are fixed-fixed beam and bottom electrode, fixed-fixed beam and side electrode, and a combination of beam, bottom electrode and side electrode. The expressions are evaluated based on the numerical result obtained using FEA analysis in COMSOL software. The accuracy of the proposed formulae is compared with available literature. The formulae proposed in this paper are valid for a wide operating range and they can also be used for array applications.

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IITH Creators:
IITH CreatorsORCiD
Pandey, A KUNSPECIFIED
Item Type: Conference or Workshop Item (Paper)
Uncontrolled Keywords: Capacitance, Electrostatic force, fringing fields
Subjects: Others > Engineering technology
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Divisions: Department of Physics
Depositing User: Team Library
Date Deposited: 22 Sep 2015 07:31
Last Modified: 22 Sep 2015 10:28
URI: http://raiith.iith.ac.in/id/eprint/1946
Publisher URL: http://dx.doi.org/10.1109/ICEmElec.2014.7151140
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