Design, Process Development and Fabrication of SU-8 based CMOS Compatible Capacitive MEMS Platform for Bio-sensing Applications

B, Srinivasan (2015) Design, Process Development and Fabrication of SU-8 based CMOS Compatible Capacitive MEMS Platform for Bio-sensing Applications. Masters thesis, Indian Institute of Technology Hyderabad.

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Abstract

Bio sensors are integrated devices which could provide information about the composition of Biological samples (semi) quantitatively. The key element of Bio sensors are their transducers which are usually Micro or Nano scale structures with Biological recognition elements as part of them. Realization of a practical and usable Bio sensor involves a wide range of interdisciplinary activities. The emerging interdisciplinary fields of Nanotechnology and Nano fabrication has helped the heterogeneous integration of Biology with Engineering systems which was not possible earlier.

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IITH Creators:
IITH CreatorsORCiD
Item Type: Thesis (Masters)
Uncontrolled Keywords: SU-8, Bio sensor, CMOS, MEMS, Fabrication, Bio-functionalization, TD392
Subjects: Others > Electricity
Others > Electronic imaging & Singal processing
Divisions: Department of Electrical Engineering
Depositing User: Library Staff
Date Deposited: 10 Jul 2015 10:32
Last Modified: 10 Jul 2015 10:32
URI: http://raiith.iith.ac.in/id/eprint/1691
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